JPH034022Y2 - - Google Patents
Info
- Publication number
- JPH034022Y2 JPH034022Y2 JP1715886U JP1715886U JPH034022Y2 JP H034022 Y2 JPH034022 Y2 JP H034022Y2 JP 1715886 U JP1715886 U JP 1715886U JP 1715886 U JP1715886 U JP 1715886U JP H034022 Y2 JPH034022 Y2 JP H034022Y2
- Authority
- JP
- Japan
- Prior art keywords
- stage
- sample
- exposure
- oil
- nut
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 description 8
- 239000003921 oil Substances 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000011109 contamination Methods 0.000 description 2
- 239000010687 lubricating oil Substances 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
Landscapes
- Transmission Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1715886U JPH034022Y2 (en]) | 1986-02-07 | 1986-02-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1715886U JPH034022Y2 (en]) | 1986-02-07 | 1986-02-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62129552U JPS62129552U (en]) | 1987-08-15 |
| JPH034022Y2 true JPH034022Y2 (en]) | 1991-02-01 |
Family
ID=30809662
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1715886U Expired JPH034022Y2 (en]) | 1986-02-07 | 1986-02-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH034022Y2 (en]) |
-
1986
- 1986-02-07 JP JP1715886U patent/JPH034022Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62129552U (en]) | 1987-08-15 |
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